Semi-automated Sub-Micron Die Bonder
Unrivaled Flexibility for Research & Prototyping

Advanced Sub-Micron Bonder

The FINEPLACER® sigma combines sub-micron placement accuracy with a 450 x 150 mm working area and bonding forces up to 1000 N.

The system is ideal for all types of precision die bonding and flip chip applications at chip and wafer level. This includes complex 2.5D and 3D IC packages, Focal Plane Arrays (i.e. image sensors), MEMS/MOEMS, and more.

Placing small devices on large substrates is made possible by the FPXvisionTM optical system design. With this alignment system, the smallest structures at the highest magnification can be viewed across the entire field of view. Moreover, FPXvisionTM introduces pattern recognition to a die bonder with manual alignment.

The FINEPLACER® sigma embraces all features of an assembly and development platform capable of handling an unlimited spectrum of applications and prepared for future technologies.

"We use the FINEPLACER® sigma for a variety of applications, ranging from simple chip-to-submount to complex module assemblies with very high accuracy requirements. Easy manual operation makes the system also an ideal fit for low-quantity research samples."

Lars Schellhase
Your Sales Contact James Bishop

Finetech USA/East Coast
+1 603 627 8989
Send an email

Key Facts*

  • Reproducible sub-micron placement accuracy
  • Pattern recognition for software verified alignment
  • Large bonding area
  • Wide range of supported component sizes
  • UHD vision alignment system with FPXvisionTM
  • Synchronized control of all process related parameters
  • Modular machine platform allows in-field retrofitting during entire service life
  • Wide range of component presentation (wafer, waffle pack, gel-pak®)
  • Numerous bonding technologies (adhesive, soldering, thermocompression, ultrasonic)
  • In-situ process observation in HD
  • 3-color LED illumination
  • Data/media logging and reporting function
  • Full process access & easy visual programming with touch screen interface
  • Ultra low bonding force
  • Process module compatibility across Finetech platforms
  • Individual configurations with process modules
  • Wide range of controlled bonding forces
  • Sequence control with predefined parameters

Applications & Technologies

Micro-optical bench assemblyIR detector assemblyGas pressure sensor assemblyVCSEL/photo diode (array) assemblyVisual image sensor assemblyGeneric MEMS assemblyMicro optics assemblySingle photon detector assemblyUltrasonic transceiver assemblyLaser diode assemblyµLED (array) assemblyLaser diode bar assemblyHigh-power laser module assemblyAcceleration sensor assemblyGeneric MOEMS assemblyInk jet print head assemblyX-ray detector assemblyOptical sub assembly (TOSA/ROSA)E-beam module assemblyMechanical assembly
Chip on Flex/Film (CoF)Chip on Glass (CoG)Multi chip packaging (MCM, MCP)Flip chip bonding (face down)2.5D and 3D IC packaging (stacking)Wafer level packaging (FOWLP, W2W, C2W)Precision die bonding (face up)Flex on boardChip on board (CoB)

Functions - Modules - Enhancements

Our solutions are as individual as our customers' requirements and offer a wide range of configuration options. In addition to the system's basic functions, which are part of the standard functional range, numerous process modules are available for each system. Retrofittable at any time, they enable additional bonding technologies and processes either directly or as part of a module package. A selection of functional enhancements and accessory systems make daily work with the machine easier and help to make certain technology and process sequences even more efficient.

Bonding Force Module (automatic)

Enhances the existing bond force range and allows the use of software controlled process forces.

Chip Heating Module

Direct contact heating from the top with chip specific tool design to apply temperature from the chip side. E.g. used for thermocompression, gluing or ACA bonding

Component Presentation

Ensures safe handling of components from GelPak®, VR trays, waffle packs or tape holders.

Die Eject Module

Pick up components directly from blue tape.

Die Flip Module

Used to flip components prior to face-down assembly.

Dipping/Stamping Module

Manual or motorized squeegee units for presentation of adhesives or flux, suitable for various sized die. Rotary and linear versions with adaptable layer thicknesses.

Dispense Module

Integration of dispensing systems for applying adhesive, flux, solder paste or other pasty material. Various supported types like time-pressure, volume and jet dispensers.

Flip Chip Test Module

The “Known Good Die Testing” allows chip probing/ testing prior to the bonding process.

Formic Acid Module

Creates an inert or reactive (CH2O2) process atmosphere. Used to reduce and prevent oxidation during soldering (e.g. eutectic or indium bonding). Add-on for Substrate Heating Modules.


Innovative digital beam splitter with two HD cameras provides highest optical resolution across a large field of view.

Height Scanner (Autofocus)

Allows automatic focus setting of component and substrate as well as height measurements.

Motorized Z Table

Positioning table with motorized z-travel for automatic working height adaptation; with manual x, y adjustment via micrometer screws.

Pattern Recognition

Software tool to recognize various alignment marks. Used to control the position or alignment between component and substrate.

Process Gas Module

Creates an inert or reactive (H2N2) atmosphere in an enclosure. Used to prevent or reduce oxidation during soldering or bonding.

Process Gas Selection

Description coming soon.

Process Video Module

Allows the in-situ observation of the working area during the bonding process.

Substrate Heating Module

Various direct contact heating options to heat up substrates from the bottom during the process. Substrate-specific fixations available. Optionally with process gas integration. Used e.g. for thermocompression, gluing or thermosonic bonding

Substrate Support

Unheated support plate with substrate specific fixation (e.g. vacuum) to clamp various substrates.

Target Finder

Enables coarse position alignment of the table to the tool with the help of a laser spot.

Tool Changer

Switch between different tools or tool tips within the process.

Traceability Module

Automatic recognition of all process relevant parameters (e.g. temperature, force, etc.) as well as associated component details (e.g. serial numbers).

Ultrasonic Module

Enables ultrasonic or thermosonic bonding. Transmits mechanical energy based on lateral movement of the ultrasonic transducer to the component while it is in contact with the substrate.

UV Curing Module

Provides ultra violet light in various wave length for adhesive processes without thermal influence.

Vacuum Chamber Module

Enables bonding processes within a system integrated vacuum chamber. No extra handling steps and fully software controlled.

Wafer Heating Module

Special substrate heating module designed for large wafers. Very uniform heat distribution during chip to wafer or wafer to wafer bonding.


Your Sales Contact James Bishop

Finetech USA/East Coast
+1 603 627 8989
Send an email

Full access with a free user account

With an user account you get:

  • instant access to all product flyers
  • access to technical data sheets (after activation)
  • access to technical papers and white papers (after activation)

Non-Business Email Address Detected
We strongly recommend to use a business email address for the registration. Our IT security policy restricts the use of public email addresses. You may not receive a response.